Research Interests
Nanometer-scale Local Oxidation
AFM image of the Harris Group logo in 50 nm oxide lines drawn with AFM lithography
I am currently investigating techniques for nanometer-scale patterning of thin films with local oxidations. I use methods involving atomic force microscope (AFM) oxidation and current-induced local oxidation (CILO). I have investigated oxidation of both metal and semiconductor substrates, and have succeeded in fabricating metal-insulator-metal junctions with 40 nm wide titanium oxide barriers in titanium. Techniques such as these may be useful in the fabrication of single-electron tunneling devices operable at room temperature.
See also: Serguei Komarov, Kazuhiko Matsumoto.